JPH0474437U - - Google Patents
Info
- Publication number
- JPH0474437U JPH0474437U JP11682790U JP11682790U JPH0474437U JP H0474437 U JPH0474437 U JP H0474437U JP 11682790 U JP11682790 U JP 11682790U JP 11682790 U JP11682790 U JP 11682790U JP H0474437 U JPH0474437 U JP H0474437U
- Authority
- JP
- Japan
- Prior art keywords
- wire
- ion beam
- ion
- stage
- contacts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims 5
- 238000010884 ion-beam technique Methods 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000000700 radioactive tracer Substances 0.000 description 2
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11682790U JPH0474437U (en]) | 1990-11-07 | 1990-11-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11682790U JPH0474437U (en]) | 1990-11-07 | 1990-11-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0474437U true JPH0474437U (en]) | 1992-06-30 |
Family
ID=31864673
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11682790U Pending JPH0474437U (en]) | 1990-11-07 | 1990-11-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0474437U (en]) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001063660A1 (fr) * | 2000-02-25 | 2001-08-30 | Hitachi, Ltd. | Appareil de detection de defauts dans un dispositif et procede de detection de defauts |
JP2002174667A (ja) * | 2000-09-11 | 2002-06-21 | Hoya Corp | 多層配線基板及びその製造方法 |
-
1990
- 1990-11-07 JP JP11682790U patent/JPH0474437U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001063660A1 (fr) * | 2000-02-25 | 2001-08-30 | Hitachi, Ltd. | Appareil de detection de defauts dans un dispositif et procede de detection de defauts |
JP2002174667A (ja) * | 2000-09-11 | 2002-06-21 | Hoya Corp | 多層配線基板及びその製造方法 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CA2152740A1 (en) | Electron beam apparatus and image forming apparatus | |
DE69422932D1 (de) | Rasterelektronenmikroskop in kontrollierter atmosphäre | |
JPH0474437U (en]) | ||
EP0373599A3 (en) | Method of determining the position of electron beam irradiation and device used in such method | |
JP2000100917A (ja) | 静電チャック装置 | |
JPH0229151U (en]) | ||
JPS6415604A (en) | Measuring apparatus for length by electron beam | |
JPH01155251U (en]) | ||
JPH0231125U (en]) | ||
JPS63146962U (en]) | ||
JPS6065967U (ja) | 走査電子顕微鏡 | |
JPH0297744U (en]) | ||
JPH0275556U (en]) | ||
JPS6419664A (en) | Ion beam device | |
JPS62188145U (en]) | ||
JPS62114439U (en]) | ||
JPS62157968U (en]) | ||
JPH0231056U (en]) | ||
JPS6119774U (ja) | 走査電子顕微鏡を用いた電位測定装置 | |
JPS63131060U (en]) | ||
JPH0363566U (en]) | ||
JPH0458938U (en]) | ||
JPS6166356U (en]) | ||
JPH03103550U (en]) | ||
JPH0244244U (en]) |